Methods for controlling dopant concentration and activation in semiconductor structures


Ontology type: sgo:Patent     


Patent Info

DATE

2010-12-07T00:00

AUTHORS

Edmund G. Seebauer , Richard D. Braatz , Michael Yoo Lim Jung , Rudiyanto Gunawan

ABSTRACT

The present invention provides methods for fabricating semiconductor structures and devices, particularly ultra-shallow doped semiconductor structures exhibiting low electrical resistance. Methods of the present invention use modification of the composition of semiconductor surfaces to allow fabrication of a doped semiconductor structure having a selected dopant concentration depth profile, which provides useful junctions and other device components in microelectronic and nanoelectronic devices, such as transistors in high density integrated circuits. Surface modification in the present invention also allows for control of the concentration and depth profile of defects, such as interstitials and vacancies, in undersaturated semiconductor materials. More... »

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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/2921", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "name": "Edmund G. Seebauer", 
        "type": "Person"
      }, 
      {
        "name": "Richard D. Braatz", 
        "type": "Person"
      }, 
      {
        "name": "Michael Yoo Lim Jung", 
        "type": "Person"
      }, 
      {
        "name": "Rudiyanto Gunawan", 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1016/0167-2738(94)90118-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1001693492"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0167-2738(94)90118-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1001693492"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0167-2738(94)90118-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1001693492"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0039-6028(90)90765-z", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002067678"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0039-6028(90)90765-z", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002067678"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1080/00207218008901117", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1004337569"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/aic.690490819", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1005137195"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0039-6028(83)90757-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1005632458"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0039-6028(83)90757-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1005632458"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.mser.2003.08.002", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006076233"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.mser.2003.08.002", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006076233"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1039/a903109j", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1007928766"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0013-4686(92)85047-o", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1009024194"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.susc.2003.12.018", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1013156639"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/cjce.5450600106", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014163437"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/cjce.5450600106", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014163437"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-3697(85)90079-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014225957"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-3697(85)90079-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014225957"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s11664-999-0119-6", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014342720", 
          "https://doi.org/10.1007/s11664-999-0119-6"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s11664-999-0119-6", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014342720", 
          "https://doi.org/10.1007/s11664-999-0119-6"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0039-6028(95)00650-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014779323"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1038/313666a0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018238782", 
          "https://doi.org/10.1038/313666a0"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0375-9601(83)90641-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018511381"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0375-9601(83)90641-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018511381"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0926-860x(97)00024-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018870792"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0926-860x(97)00021-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018880942"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0926-860x(97)00021-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018880942"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1246/cl.1986.1845", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018999986"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0039-6028(73)90337-3", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1019022958"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0039-6028(73)90337-3", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1019022958"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0304-5102(93)e0247-e", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1021422464"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0039-6028(96)00763-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022232357"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0953-8984/10/5/009", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1024159976"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1080/10420159408221047", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1025829360"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1038/nmat1134", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1025956058", 
          "https://doi.org/10.1038/nmat1134"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1038/nmat1134", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1025956058", 
          "https://doi.org/10.1038/nmat1134"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/pssb.200404943", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026528099"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/aic.10587", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027324014"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/aic.10587", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027324014"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1038/35088026", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1028141548", 
          "https://doi.org/10.1038/35088026"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1038/35088026", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1028141548", 
          "https://doi.org/10.1038/35088026"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1038/35040526", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030640559", 
          "https://doi.org/10.1038/35040526"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1038/35040526", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030640559", 
          "https://doi.org/10.1038/35040526"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.susc.2003.12.033", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1031259453"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1149/1.1391990", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032696234"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0304-3991(91)90084-j", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1035216933"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0304-3991(91)90084-j", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1035216933"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0025-5416(70)90014-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1037642430"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0025-5416(70)90014-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1037642430"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-0248(93)90148-p", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040326937"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-0248(93)90148-p", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040326937"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0926-860x(97)00017-3", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1043065307"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.jprocont.2003.07.005", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1043559851"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.jprocont.2003.07.005", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1043559851"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.susc.2005.03.026", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1044804053"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s11664-998-0090-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045003400", 
          "https://doi.org/10.1007/s11664-998-0090-7"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s11664-998-0090-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045003400", 
          "https://doi.org/10.1007/s11664-998-0090-7"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/pssa.2210810126", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045505947"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0040-6090(01)01054-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045756618"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-3697(94)90117-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045803462"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-3697(94)90117-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045803462"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0925-4005(01)01031-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1046082605"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0925-4005(01)01031-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1046082605"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0168-583x(93)95038-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048015310"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0168-583x(93)95038-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048015310"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/aic.10220", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048072541"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0039-6028(99)01031-6", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048425145"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/jmr.1997.0068", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048686524"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf00813739", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1050897110", 
          "https://doi.org/10.1007/bf00813739"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf00813739", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1050897110", 
          "https://doi.org/10.1007/bf00813739"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0038-1101(99)00283-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1051253004"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0098-1354(03)00045-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1052911774"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0098-1354(03)00045-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1052911774"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0039-6028(94)91231-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1053626103"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0039-6028(94)91231-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1053626103"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0301-0104(89)80075-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1053667649"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/cr00033a004", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1053963872"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/ef00021a014", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055474059"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/j100036a002", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055650265"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/j100389a021", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055668657"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/ja011131i", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055769461"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/ja011131i", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055769461"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/ja020115y", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055824360"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/ja020115y", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055824360"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/jp0007890", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056042663"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/jp0007890", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056042663"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/jp027827v", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056051959"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/jp027827v", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056051959"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/la9702648", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056168509"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/la9702648", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1056168509"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.114733", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057675585"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.121425", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057685595"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.122252", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057686415"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1348322", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057697434"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1471941", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057710010"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1638621", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057728736"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1662839", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057741203"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1754438", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057814883"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.346910", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057957137"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.347023", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057957323"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.367228", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057996983"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.370285", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058004578"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.370719", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058005130"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.371832", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058006233"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.463657", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058041668"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.465435", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058043443"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.91261", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058131400"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrev.154.696", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060434726"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrev.154.696", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060434726"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrev.154.696", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060434726"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.14.1577", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060521375"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.14.1577", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060521375"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.14.1577", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060521375"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.26.3841", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060531385"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.26.3841", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060531385"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.33.2674", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060539412"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.33.2674", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060539412"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.35.5913", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060542637"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.35.5913", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060542637"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.35.5913", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060542637"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.36.4821", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060543956"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.36.4821", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060543956"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.36.4821", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060543956"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.38.9913", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060548424"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.38.9913", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060548424"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.38.9913", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060548424"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.40.3483", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060551821"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.40.3483", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060551821"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.47.10497", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060564742"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.47.10497", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060564742"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.47.10497", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060564742"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.47.5037", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060566213"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.47.5037", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060566213"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.56.10483", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060585268"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.56.10483", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060585268"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.56.10483", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060585268"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.58.4903", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060589927"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.58.4903", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060589927"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.61.13710", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060595276"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.61.13710", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060595276"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.61.13710", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060595276"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.61.8155", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060596327"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.61.8155", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060596327"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.62.15431", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060597211"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.62.15431", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060597211"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.62.15431", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060597211"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physreve.53.2436", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060719055"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physreve.53.2436", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060719055"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.27.188", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060775114"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.27.188", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060775114"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.36.1335", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060780106"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.36.1335", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060780106"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.59.1691", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060795691"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.59.1691", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060795691"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.65.2434", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060801488"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.65.2434", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060801488"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.70.2471", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060806724"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.70.2471", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060806724"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.79.673", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060816535"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.79.673", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060816535"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.79.673", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060816535"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.81.1259", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060817894"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.81.1259", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060817894"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.81.393", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060818384"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.81.393", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060818384"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.82.1185", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060818898"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.82.1185", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060818898"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/revmodphys.61.289", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060839173"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/revmodphys.61.289", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060839173"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/t-ed.1985.21920", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061463601"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.1560331", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062168430"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.579925", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062189972"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.582041", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062192088"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.36.7433", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063058525"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.42.3304", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063069967"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1149/1.1393993", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063186940"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1149/1.1619992", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063188125"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1149/1.1627354", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063188172"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1209/0295-5075/3/1/005", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1064230308"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/josab.10.000546", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065167183"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2010-12-07T00:00", 
    "description": "

The present invention provides methods for fabricating semiconductor structures and devices, particularly ultra-shallow doped semiconductor structures exhibiting low electrical resistance. Methods of the present invention use modification of the composition of semiconductor surfaces to allow fabrication of a doped semiconductor structure having a selected dopant concentration depth profile, which provides useful junctions and other device components in microelectronic and nanoelectronic devices, such as transistors in high density integrated circuits. Surface modification in the present invention also allows for control of the concentration and depth profile of defects, such as interstitials and vacancies, in undersaturated semiconductor materials.

", "id": "sg:patent.US-7846822-B2", "keywords": [ "method", "dopant concentration", "semiconductor structure", "invention", "Equipment and Supply", "resistance", "modification", "composition", "semiconductor surface", "fabrication", "junction", "component", "nanoelectronic device", "transistor", "integrated circuit", "surface modification", "control", "Attention", "depth profile", "defect", "vacancy", "semiconductor material" ], "name": "Methods for controlling dopant concentration and activation in semiconductor structures", "recipient": [ { "id": "https://www.grid.ac/institutes/grid.411030.7", "type": "Organization" } ], "sameAs": [ "https://app.dimensions.ai/details/patent/US-7846822-B2" ], "sdDataset": "patents", "sdDatePublished": "2019-04-18T10:06", "sdLicense": "https://scigraph.springernature.com/explorer/license/", "sdPublisher": { "name": "Springer Nature - SN SciGraph project", "type": "Organization" }, "sdSource": "s3://com-uberresearch-data-patents-target-20190320-rc/data/sn-export/402f166718b70575fb5d4ffe01f064d1/0000100128-0000352499/json_export_00140.jsonl", "type": "Patent" } ]
 

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This table displays all metadata directly associated to this object as RDF triples.

402 TRIPLES      15 PREDICATES      149 URIs      30 LITERALS      2 BLANK NODES

Subject Predicate Object
1 sg:patent.US-7846822-B2 schema:about anzsrc-for:2921
2 schema:author Nd7b72dfeeeb742afa9247c767b0ac50b
3 schema:citation sg:pub.10.1007/bf00813739
4 sg:pub.10.1007/s11664-998-0090-7
5 sg:pub.10.1007/s11664-999-0119-6
6 sg:pub.10.1038/313666a0
7 sg:pub.10.1038/35040526
8 sg:pub.10.1038/35088026
9 sg:pub.10.1038/nmat1134
10 https://doi.org/10.1002/aic.10220
11 https://doi.org/10.1002/aic.10587
12 https://doi.org/10.1002/aic.690490819
13 https://doi.org/10.1002/cjce.5450600106
14 https://doi.org/10.1002/pssa.2210810126
15 https://doi.org/10.1002/pssb.200404943
16 https://doi.org/10.1016/0013-4686(92)85047-o
17 https://doi.org/10.1016/0022-0248(93)90148-p
18 https://doi.org/10.1016/0022-3697(85)90079-4
19 https://doi.org/10.1016/0022-3697(94)90117-1
20 https://doi.org/10.1016/0025-5416(70)90014-5
21 https://doi.org/10.1016/0039-6028(73)90337-3
22 https://doi.org/10.1016/0039-6028(83)90757-4
23 https://doi.org/10.1016/0039-6028(90)90765-z
24 https://doi.org/10.1016/0039-6028(94)91231-9
25 https://doi.org/10.1016/0039-6028(95)00650-8
26 https://doi.org/10.1016/0039-6028(96)00763-7
27 https://doi.org/10.1016/0167-2738(94)90118-x
28 https://doi.org/10.1016/0168-583x(93)95038-7
29 https://doi.org/10.1016/0301-0104(89)80075-8
30 https://doi.org/10.1016/0304-3991(91)90084-j
31 https://doi.org/10.1016/0304-5102(93)e0247-e
32 https://doi.org/10.1016/0375-9601(83)90641-2
33 https://doi.org/10.1016/j.jprocont.2003.07.005
34 https://doi.org/10.1016/j.mser.2003.08.002
35 https://doi.org/10.1016/j.susc.2003.12.018
36 https://doi.org/10.1016/j.susc.2003.12.033
37 https://doi.org/10.1016/j.susc.2005.03.026
38 https://doi.org/10.1016/s0038-1101(99)00283-x
39 https://doi.org/10.1016/s0039-6028(99)01031-6
40 https://doi.org/10.1016/s0040-6090(01)01054-9
41 https://doi.org/10.1016/s0098-1354(03)00045-0
42 https://doi.org/10.1016/s0925-4005(01)01031-0
43 https://doi.org/10.1016/s0926-860x(97)00017-3
44 https://doi.org/10.1016/s0926-860x(97)00021-5
45 https://doi.org/10.1016/s0926-860x(97)00024-0
46 https://doi.org/10.1021/cr00033a004
47 https://doi.org/10.1021/ef00021a014
48 https://doi.org/10.1021/j100036a002
49 https://doi.org/10.1021/j100389a021
50 https://doi.org/10.1021/ja011131i
51 https://doi.org/10.1021/ja020115y
52 https://doi.org/10.1021/jp0007890
53 https://doi.org/10.1021/jp027827v
54 https://doi.org/10.1021/la9702648
55 https://doi.org/10.1039/a903109j
56 https://doi.org/10.1063/1.114733
57 https://doi.org/10.1063/1.121425
58 https://doi.org/10.1063/1.122252
59 https://doi.org/10.1063/1.1348322
60 https://doi.org/10.1063/1.1471941
61 https://doi.org/10.1063/1.1638621
62 https://doi.org/10.1063/1.1662839
63 https://doi.org/10.1063/1.1754438
64 https://doi.org/10.1063/1.346910
65 https://doi.org/10.1063/1.347023
66 https://doi.org/10.1063/1.367228
67 https://doi.org/10.1063/1.370285
68 https://doi.org/10.1063/1.370719
69 https://doi.org/10.1063/1.371832
70 https://doi.org/10.1063/1.463657
71 https://doi.org/10.1063/1.465435
72 https://doi.org/10.1063/1.91261
73 https://doi.org/10.1080/00207218008901117
74 https://doi.org/10.1080/10420159408221047
75 https://doi.org/10.1088/0953-8984/10/5/009
76 https://doi.org/10.1103/physrev.154.696
77 https://doi.org/10.1103/physrevb.14.1577
78 https://doi.org/10.1103/physrevb.26.3841
79 https://doi.org/10.1103/physrevb.33.2674
80 https://doi.org/10.1103/physrevb.35.5913
81 https://doi.org/10.1103/physrevb.36.4821
82 https://doi.org/10.1103/physrevb.38.9913
83 https://doi.org/10.1103/physrevb.40.3483
84 https://doi.org/10.1103/physrevb.47.10497
85 https://doi.org/10.1103/physrevb.47.5037
86 https://doi.org/10.1103/physrevb.56.10483
87 https://doi.org/10.1103/physrevb.58.4903
88 https://doi.org/10.1103/physrevb.61.13710
89 https://doi.org/10.1103/physrevb.61.8155
90 https://doi.org/10.1103/physrevb.62.15431
91 https://doi.org/10.1103/physreve.53.2436
92 https://doi.org/10.1103/physrevlett.27.188
93 https://doi.org/10.1103/physrevlett.36.1335
94 https://doi.org/10.1103/physrevlett.59.1691
95 https://doi.org/10.1103/physrevlett.65.2434
96 https://doi.org/10.1103/physrevlett.70.2471
97 https://doi.org/10.1103/physrevlett.79.673
98 https://doi.org/10.1103/physrevlett.81.1259
99 https://doi.org/10.1103/physrevlett.81.393
100 https://doi.org/10.1103/physrevlett.82.1185
101 https://doi.org/10.1103/revmodphys.61.289
102 https://doi.org/10.1109/t-ed.1985.21920
103 https://doi.org/10.1116/1.1560331
104 https://doi.org/10.1116/1.579925
105 https://doi.org/10.1116/1.582041
106 https://doi.org/10.1143/jjap.36.7433
107 https://doi.org/10.1143/jjap.42.3304
108 https://doi.org/10.1149/1.1391990
109 https://doi.org/10.1149/1.1393993
110 https://doi.org/10.1149/1.1619992
111 https://doi.org/10.1149/1.1627354
112 https://doi.org/10.1209/0295-5075/3/1/005
113 https://doi.org/10.1246/cl.1986.1845
114 https://doi.org/10.1364/josab.10.000546
115 https://doi.org/10.1557/jmr.1997.0068
116 schema:datePublished 2010-12-07T00:00
117 schema:description <p num="p-0001">The present invention provides methods for fabricating semiconductor structures and devices, particularly ultra-shallow doped semiconductor structures exhibiting low electrical resistance. Methods of the present invention use modification of the composition of semiconductor surfaces to allow fabrication of a doped semiconductor structure having a selected dopant concentration depth profile, which provides useful junctions and other device components in microelectronic and nanoelectronic devices, such as transistors in high density integrated circuits. Surface modification in the present invention also allows for control of the concentration and depth profile of defects, such as interstitials and vacancies, in undersaturated semiconductor materials.</p>
118 schema:keywords Attention
119 Equipment and Supply
120 component
121 composition
122 control
123 defect
124 depth profile
125 dopant concentration
126 fabrication
127 integrated circuit
128 invention
129 junction
130 method
131 modification
132 nanoelectronic device
133 resistance
134 semiconductor material
135 semiconductor structure
136 semiconductor surface
137 surface modification
138 transistor
139 vacancy
140 schema:name Methods for controlling dopant concentration and activation in semiconductor structures
141 schema:recipient https://www.grid.ac/institutes/grid.411030.7
142 schema:sameAs https://app.dimensions.ai/details/patent/US-7846822-B2
143 schema:sdDatePublished 2019-04-18T10:06
144 schema:sdLicense https://scigraph.springernature.com/explorer/license/
145 schema:sdPublisher Nad4b2dd6c2de44568a722eed9d3037fc
146 sgo:license sg:explorer/license/
147 sgo:sdDataset patents
148 rdf:type sgo:Patent
149 N2b5b19f82dc6400080f64002baee54e8 schema:name Edmund G. Seebauer
150 rdf:type schema:Person
151 N626d2bfc1bd146e188d384f6f7531c2b schema:name Rudiyanto Gunawan
152 rdf:type schema:Person
153 N8f8182ce7b6540648f9d60293e0a0199 rdf:first Ne4c231d6fe524e46b5d8cecdbf9c7d07
154 rdf:rest Nb4bf04f8753a4719aaf97dd05ab5e921
155 N9ab564a762d1426f83b3e1c413b5dfcd schema:name Michael Yoo Lim Jung
156 rdf:type schema:Person
157 Nad4b2dd6c2de44568a722eed9d3037fc schema:name Springer Nature - SN SciGraph project
158 rdf:type schema:Organization
159 Nb4bf04f8753a4719aaf97dd05ab5e921 rdf:first N9ab564a762d1426f83b3e1c413b5dfcd
160 rdf:rest Nc3937576842d4ef88f7e6c3feff71114
161 Nc3937576842d4ef88f7e6c3feff71114 rdf:first N626d2bfc1bd146e188d384f6f7531c2b
162 rdf:rest rdf:nil
163 Nd7b72dfeeeb742afa9247c767b0ac50b rdf:first N2b5b19f82dc6400080f64002baee54e8
164 rdf:rest N8f8182ce7b6540648f9d60293e0a0199
165 Ne4c231d6fe524e46b5d8cecdbf9c7d07 schema:name Richard D. Braatz
166 rdf:type schema:Person
167 anzsrc-for:2921 schema:inDefinedTermSet anzsrc-for:
168 rdf:type schema:DefinedTerm
169 sg:pub.10.1007/bf00813739 schema:sameAs https://app.dimensions.ai/details/publication/pub.1050897110
170 https://doi.org/10.1007/bf00813739
171 rdf:type schema:CreativeWork
172 sg:pub.10.1007/s11664-998-0090-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045003400
173 https://doi.org/10.1007/s11664-998-0090-7
174 rdf:type schema:CreativeWork
175 sg:pub.10.1007/s11664-999-0119-6 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014342720
176 https://doi.org/10.1007/s11664-999-0119-6
177 rdf:type schema:CreativeWork
178 sg:pub.10.1038/313666a0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018238782
179 https://doi.org/10.1038/313666a0
180 rdf:type schema:CreativeWork
181 sg:pub.10.1038/35040526 schema:sameAs https://app.dimensions.ai/details/publication/pub.1030640559
182 https://doi.org/10.1038/35040526
183 rdf:type schema:CreativeWork
184 sg:pub.10.1038/35088026 schema:sameAs https://app.dimensions.ai/details/publication/pub.1028141548
185 https://doi.org/10.1038/35088026
186 rdf:type schema:CreativeWork
187 sg:pub.10.1038/nmat1134 schema:sameAs https://app.dimensions.ai/details/publication/pub.1025956058
188 https://doi.org/10.1038/nmat1134
189 rdf:type schema:CreativeWork
190 https://doi.org/10.1002/aic.10220 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048072541
191 rdf:type schema:CreativeWork
192 https://doi.org/10.1002/aic.10587 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027324014
193 rdf:type schema:CreativeWork
194 https://doi.org/10.1002/aic.690490819 schema:sameAs https://app.dimensions.ai/details/publication/pub.1005137195
195 rdf:type schema:CreativeWork
196 https://doi.org/10.1002/cjce.5450600106 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014163437
197 rdf:type schema:CreativeWork
198 https://doi.org/10.1002/pssa.2210810126 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045505947
199 rdf:type schema:CreativeWork
200 https://doi.org/10.1002/pssb.200404943 schema:sameAs https://app.dimensions.ai/details/publication/pub.1026528099
201 rdf:type schema:CreativeWork
202 https://doi.org/10.1016/0013-4686(92)85047-o schema:sameAs https://app.dimensions.ai/details/publication/pub.1009024194
203 rdf:type schema:CreativeWork
204 https://doi.org/10.1016/0022-0248(93)90148-p schema:sameAs https://app.dimensions.ai/details/publication/pub.1040326937
205 rdf:type schema:CreativeWork
206 https://doi.org/10.1016/0022-3697(85)90079-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014225957
207 rdf:type schema:CreativeWork
208 https://doi.org/10.1016/0022-3697(94)90117-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045803462
209 rdf:type schema:CreativeWork
210 https://doi.org/10.1016/0025-5416(70)90014-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1037642430
211 rdf:type schema:CreativeWork
212 https://doi.org/10.1016/0039-6028(73)90337-3 schema:sameAs https://app.dimensions.ai/details/publication/pub.1019022958
213 rdf:type schema:CreativeWork
214 https://doi.org/10.1016/0039-6028(83)90757-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1005632458
215 rdf:type schema:CreativeWork
216 https://doi.org/10.1016/0039-6028(90)90765-z schema:sameAs https://app.dimensions.ai/details/publication/pub.1002067678
217 rdf:type schema:CreativeWork
218 https://doi.org/10.1016/0039-6028(94)91231-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053626103
219 rdf:type schema:CreativeWork
220 https://doi.org/10.1016/0039-6028(95)00650-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014779323
221 rdf:type schema:CreativeWork
222 https://doi.org/10.1016/0039-6028(96)00763-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022232357
223 rdf:type schema:CreativeWork
224 https://doi.org/10.1016/0167-2738(94)90118-x schema:sameAs https://app.dimensions.ai/details/publication/pub.1001693492
225 rdf:type schema:CreativeWork
226 https://doi.org/10.1016/0168-583x(93)95038-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048015310
227 rdf:type schema:CreativeWork
228 https://doi.org/10.1016/0301-0104(89)80075-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053667649
229 rdf:type schema:CreativeWork
230 https://doi.org/10.1016/0304-3991(91)90084-j schema:sameAs https://app.dimensions.ai/details/publication/pub.1035216933
231 rdf:type schema:CreativeWork
232 https://doi.org/10.1016/0304-5102(93)e0247-e schema:sameAs https://app.dimensions.ai/details/publication/pub.1021422464
233 rdf:type schema:CreativeWork
234 https://doi.org/10.1016/0375-9601(83)90641-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018511381
235 rdf:type schema:CreativeWork
236 https://doi.org/10.1016/j.jprocont.2003.07.005 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043559851
237 rdf:type schema:CreativeWork
238 https://doi.org/10.1016/j.mser.2003.08.002 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006076233
239 rdf:type schema:CreativeWork
240 https://doi.org/10.1016/j.susc.2003.12.018 schema:sameAs https://app.dimensions.ai/details/publication/pub.1013156639
241 rdf:type schema:CreativeWork
242 https://doi.org/10.1016/j.susc.2003.12.033 schema:sameAs https://app.dimensions.ai/details/publication/pub.1031259453
243 rdf:type schema:CreativeWork
244 https://doi.org/10.1016/j.susc.2005.03.026 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044804053
245 rdf:type schema:CreativeWork
246 https://doi.org/10.1016/s0038-1101(99)00283-x schema:sameAs https://app.dimensions.ai/details/publication/pub.1051253004
247 rdf:type schema:CreativeWork
248 https://doi.org/10.1016/s0039-6028(99)01031-6 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048425145
249 rdf:type schema:CreativeWork
250 https://doi.org/10.1016/s0040-6090(01)01054-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045756618
251 rdf:type schema:CreativeWork
252 https://doi.org/10.1016/s0098-1354(03)00045-0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1052911774
253 rdf:type schema:CreativeWork
254 https://doi.org/10.1016/s0925-4005(01)01031-0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1046082605
255 rdf:type schema:CreativeWork
256 https://doi.org/10.1016/s0926-860x(97)00017-3 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043065307
257 rdf:type schema:CreativeWork
258 https://doi.org/10.1016/s0926-860x(97)00021-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018880942
259 rdf:type schema:CreativeWork
260 https://doi.org/10.1016/s0926-860x(97)00024-0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018870792
261 rdf:type schema:CreativeWork
262 https://doi.org/10.1021/cr00033a004 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053963872
263 rdf:type schema:CreativeWork
264 https://doi.org/10.1021/ef00021a014 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055474059
265 rdf:type schema:CreativeWork
266 https://doi.org/10.1021/j100036a002 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055650265
267 rdf:type schema:CreativeWork
268 https://doi.org/10.1021/j100389a021 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055668657
269 rdf:type schema:CreativeWork
270 https://doi.org/10.1021/ja011131i schema:sameAs https://app.dimensions.ai/details/publication/pub.1055769461
271 rdf:type schema:CreativeWork
272 https://doi.org/10.1021/ja020115y schema:sameAs https://app.dimensions.ai/details/publication/pub.1055824360
273 rdf:type schema:CreativeWork
274 https://doi.org/10.1021/jp0007890 schema:sameAs https://app.dimensions.ai/details/publication/pub.1056042663
275 rdf:type schema:CreativeWork
276 https://doi.org/10.1021/jp027827v schema:sameAs https://app.dimensions.ai/details/publication/pub.1056051959
277 rdf:type schema:CreativeWork
278 https://doi.org/10.1021/la9702648 schema:sameAs https://app.dimensions.ai/details/publication/pub.1056168509
279 rdf:type schema:CreativeWork
280 https://doi.org/10.1039/a903109j schema:sameAs https://app.dimensions.ai/details/publication/pub.1007928766
281 rdf:type schema:CreativeWork
282 https://doi.org/10.1063/1.114733 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057675585
283 rdf:type schema:CreativeWork
284 https://doi.org/10.1063/1.121425 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057685595
285 rdf:type schema:CreativeWork
286 https://doi.org/10.1063/1.122252 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057686415
287 rdf:type schema:CreativeWork
288 https://doi.org/10.1063/1.1348322 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057697434
289 rdf:type schema:CreativeWork
290 https://doi.org/10.1063/1.1471941 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057710010
291 rdf:type schema:CreativeWork
292 https://doi.org/10.1063/1.1638621 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057728736
293 rdf:type schema:CreativeWork
294 https://doi.org/10.1063/1.1662839 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057741203
295 rdf:type schema:CreativeWork
296 https://doi.org/10.1063/1.1754438 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057814883
297 rdf:type schema:CreativeWork
298 https://doi.org/10.1063/1.346910 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057957137
299 rdf:type schema:CreativeWork
300 https://doi.org/10.1063/1.347023 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057957323
301 rdf:type schema:CreativeWork
302 https://doi.org/10.1063/1.367228 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057996983
303 rdf:type schema:CreativeWork
304 https://doi.org/10.1063/1.370285 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058004578
305 rdf:type schema:CreativeWork
306 https://doi.org/10.1063/1.370719 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058005130
307 rdf:type schema:CreativeWork
308 https://doi.org/10.1063/1.371832 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058006233
309 rdf:type schema:CreativeWork
310 https://doi.org/10.1063/1.463657 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058041668
311 rdf:type schema:CreativeWork
312 https://doi.org/10.1063/1.465435 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058043443
313 rdf:type schema:CreativeWork
314 https://doi.org/10.1063/1.91261 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058131400
315 rdf:type schema:CreativeWork
316 https://doi.org/10.1080/00207218008901117 schema:sameAs https://app.dimensions.ai/details/publication/pub.1004337569
317 rdf:type schema:CreativeWork
318 https://doi.org/10.1080/10420159408221047 schema:sameAs https://app.dimensions.ai/details/publication/pub.1025829360
319 rdf:type schema:CreativeWork
320 https://doi.org/10.1088/0953-8984/10/5/009 schema:sameAs https://app.dimensions.ai/details/publication/pub.1024159976
321 rdf:type schema:CreativeWork
322 https://doi.org/10.1103/physrev.154.696 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060434726
323 rdf:type schema:CreativeWork
324 https://doi.org/10.1103/physrevb.14.1577 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060521375
325 rdf:type schema:CreativeWork
326 https://doi.org/10.1103/physrevb.26.3841 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060531385
327 rdf:type schema:CreativeWork
328 https://doi.org/10.1103/physrevb.33.2674 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060539412
329 rdf:type schema:CreativeWork
330 https://doi.org/10.1103/physrevb.35.5913 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060542637
331 rdf:type schema:CreativeWork
332 https://doi.org/10.1103/physrevb.36.4821 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060543956
333 rdf:type schema:CreativeWork
334 https://doi.org/10.1103/physrevb.38.9913 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060548424
335 rdf:type schema:CreativeWork
336 https://doi.org/10.1103/physrevb.40.3483 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060551821
337 rdf:type schema:CreativeWork
338 https://doi.org/10.1103/physrevb.47.10497 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060564742
339 rdf:type schema:CreativeWork
340 https://doi.org/10.1103/physrevb.47.5037 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060566213
341 rdf:type schema:CreativeWork
342 https://doi.org/10.1103/physrevb.56.10483 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060585268
343 rdf:type schema:CreativeWork
344 https://doi.org/10.1103/physrevb.58.4903 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060589927
345 rdf:type schema:CreativeWork
346 https://doi.org/10.1103/physrevb.61.13710 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060595276
347 rdf:type schema:CreativeWork
348 https://doi.org/10.1103/physrevb.61.8155 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060596327
349 rdf:type schema:CreativeWork
350 https://doi.org/10.1103/physrevb.62.15431 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060597211
351 rdf:type schema:CreativeWork
352 https://doi.org/10.1103/physreve.53.2436 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060719055
353 rdf:type schema:CreativeWork
354 https://doi.org/10.1103/physrevlett.27.188 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060775114
355 rdf:type schema:CreativeWork
356 https://doi.org/10.1103/physrevlett.36.1335 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060780106
357 rdf:type schema:CreativeWork
358 https://doi.org/10.1103/physrevlett.59.1691 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060795691
359 rdf:type schema:CreativeWork
360 https://doi.org/10.1103/physrevlett.65.2434 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060801488
361 rdf:type schema:CreativeWork
362 https://doi.org/10.1103/physrevlett.70.2471 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060806724
363 rdf:type schema:CreativeWork
364 https://doi.org/10.1103/physrevlett.79.673 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060816535
365 rdf:type schema:CreativeWork
366 https://doi.org/10.1103/physrevlett.81.1259 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060817894
367 rdf:type schema:CreativeWork
368 https://doi.org/10.1103/physrevlett.81.393 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060818384
369 rdf:type schema:CreativeWork
370 https://doi.org/10.1103/physrevlett.82.1185 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060818898
371 rdf:type schema:CreativeWork
372 https://doi.org/10.1103/revmodphys.61.289 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060839173
373 rdf:type schema:CreativeWork
374 https://doi.org/10.1109/t-ed.1985.21920 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061463601
375 rdf:type schema:CreativeWork
376 https://doi.org/10.1116/1.1560331 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062168430
377 rdf:type schema:CreativeWork
378 https://doi.org/10.1116/1.579925 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062189972
379 rdf:type schema:CreativeWork
380 https://doi.org/10.1116/1.582041 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062192088
381 rdf:type schema:CreativeWork
382 https://doi.org/10.1143/jjap.36.7433 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063058525
383 rdf:type schema:CreativeWork
384 https://doi.org/10.1143/jjap.42.3304 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063069967
385 rdf:type schema:CreativeWork
386 https://doi.org/10.1149/1.1391990 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032696234
387 rdf:type schema:CreativeWork
388 https://doi.org/10.1149/1.1393993 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063186940
389 rdf:type schema:CreativeWork
390 https://doi.org/10.1149/1.1619992 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063188125
391 rdf:type schema:CreativeWork
392 https://doi.org/10.1149/1.1627354 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063188172
393 rdf:type schema:CreativeWork
394 https://doi.org/10.1209/0295-5075/3/1/005 schema:sameAs https://app.dimensions.ai/details/publication/pub.1064230308
395 rdf:type schema:CreativeWork
396 https://doi.org/10.1246/cl.1986.1845 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018999986
397 rdf:type schema:CreativeWork
398 https://doi.org/10.1364/josab.10.000546 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065167183
399 rdf:type schema:CreativeWork
400 https://doi.org/10.1557/jmr.1997.0068 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048686524
401 rdf:type schema:CreativeWork
402 https://www.grid.ac/institutes/grid.411030.7 schema:Organization
 




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