Low resistance tunneling magnetoresistive sensor with composite inner pinned layer


Ontology type: sgo:Patent     


Patent Info

DATE

N/A

AUTHORS

Tong Zhao , Hui-Chuan Wang , Kunliang Zhang , Yu-Hsia Chen , Min Li

ABSTRACT

A high performance TMR sensor is fabricated by employing a composite inner pinned (AP1) layer in an AP2/Ru/AP1 pinned layer configuration. In one embodiment, there is a 10 to 80 Angstrom thick lower CoFeB or CoFeB alloy layer on the Ru coupling layer, a and 5 to 50 Angstrom thick Fe or Fe alloy layer on the CoFeB or CoFeB alloy, and a 5 to 30 Angstrom thick Co or Co rich alloy layer formed on the Fe or Fe alloy. A MR ratio of about 48% with a RA of <2 ohm-um2 is achieved when a CoFe AP2 layer, MgO (NOX) tunnel barrier, and CoFe/NiFe free layer are used in the TMR stack. Improved RA uniformity and less head noise are observed. Optionally, a CoFe layer may be inserted between the coupling layer and CoFeB or CoFeB alloy layer to improve pinning strength and enhance crystallization. More... »

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/2921", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "name": "Tong Zhao", 
        "type": "Person"
      }, 
      {
        "name": "Hui-Chuan Wang", 
        "type": "Person"
      }, 
      {
        "name": "Kunliang Zhang", 
        "type": "Person"
      }, 
      {
        "name": "Yu-Hsia Chen", 
        "type": "Person"
      }, 
      {
        "name": "Min Li", 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1038/nmat1257", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1047761572", 
          "https://doi.org/10.1038/nmat1257"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1038/nmat1256", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1053403072", 
          "https://doi.org/10.1038/nmat1256"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "description": "

A high performance TMR sensor is fabricated by employing a composite inner pinned (AP1) layer in an AP2/Ru/AP1 pinned layer configuration. In one embodiment, there is a 10 to 80 Angstrom thick lower CoFeB or CoFeB alloy layer on the Ru coupling layer, a and 5 to 50 Angstrom thick Fe or Fe alloy layer on the CoFeB or CoFeB alloy, and a 5 to 30 Angstrom thick Co or Co rich alloy layer formed on the Fe or Fe alloy. A MR ratio of about 48% with a RA of <2 ohm-um2 is achieved when a CoFe AP2 layer, MgO (NOX) tunnel barrier, and CoFe/NiFe free layer are used in the TMR stack. Improved RA uniformity and less head noise are observed. Optionally, a CoFe layer may be inserted between the coupling layer and CoFeB or CoFeB alloy layer to improve pinning strength and enhance crystallization.

", "id": "sg:patent.US-7602033-B2", "keywords": [ "low resistance", "composite", "high performance", "AP", "layer", "configuration", "embodiment", "angstrom", "alloy", "coupling", "Fe", "CO", "ratio", "ra", "um", "NOx", "tunnel barrier", "TMR", "uniformity", "noise", "crystallization" ], "name": "Low resistance tunneling magnetoresistive sensor with composite inner pinned layer", "recipient": [ { "id": "https://www.grid.ac/institutes/grid.471215.4", "type": "Organization" } ], "sameAs": [ "https://app.dimensions.ai/details/patent/US-7602033-B2" ], "sdDataset": "patents", "sdDatePublished": "2019-03-07T15:34", "sdLicense": "https://scigraph.springernature.com/explorer/license/", "sdPublisher": { "name": "Springer Nature - SN SciGraph project", "type": "Organization" }, "sdSource": "s3://com.uberresearch.data.dev.patents-pipeline/full_run_10/sn-export/5eb3e5a348d7f117b22cc85fb0b02730/0000100128-0000348334/json_export_83943d3a.jsonl", "type": "Patent" } ]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/patent.US-7602033-B2'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/patent.US-7602033-B2'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/patent.US-7602033-B2'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/patent.US-7602033-B2'


 

This table displays all metadata directly associated to this object as RDF triples.

66 TRIPLES      14 PREDICATES      36 URIs      28 LITERALS      2 BLANK NODES

Subject Predicate Object
1 sg:patent.US-7602033-B2 schema:about anzsrc-for:2921
2 schema:author Nee7b5d2dd59a4878817c3560176c3ffe
3 schema:citation sg:pub.10.1038/nmat1256
4 sg:pub.10.1038/nmat1257
5 schema:description <p num="p-0001">A high performance TMR sensor is fabricated by employing a composite inner pinned (AP<b>1</b>) layer in an AP<b>2</b>/Ru/AP<b>1</b> pinned layer configuration. In one embodiment, there is a 10 to 80 Angstrom thick lower CoFeB or CoFeB alloy layer on the Ru coupling layer, a and 5 to 50 Angstrom thick Fe or Fe alloy layer on the CoFeB or CoFeB alloy, and a 5 to 30 Angstrom thick Co or Co rich alloy layer formed on the Fe or Fe alloy. A MR ratio of about 48% with a RA of &lt;2 ohm-um<sup>2 </sup>is achieved when a CoFe AP<b>2</b> layer, MgO (NOX) tunnel barrier, and CoFe/NiFe free layer are used in the TMR stack. Improved RA uniformity and less head noise are observed. Optionally, a CoFe layer may be inserted between the coupling layer and CoFeB or CoFeB alloy layer to improve pinning strength and enhance crystallization.</p>
6 schema:keywords AP
7 CO
8 Fe
9 NOx
10 TMR
11 alloy
12 angstrom
13 composite
14 configuration
15 coupling
16 crystallization
17 embodiment
18 high performance
19 layer
20 low resistance
21 noise
22 ra
23 ratio
24 tunnel barrier
25 um
26 uniformity
27 schema:name Low resistance tunneling magnetoresistive sensor with composite inner pinned layer
28 schema:recipient https://www.grid.ac/institutes/grid.471215.4
29 schema:sameAs https://app.dimensions.ai/details/patent/US-7602033-B2
30 schema:sdDatePublished 2019-03-07T15:34
31 schema:sdLicense https://scigraph.springernature.com/explorer/license/
32 schema:sdPublisher Nc2c1e34d92da4b898a295d4ab787ca56
33 sgo:license sg:explorer/license/
34 sgo:sdDataset patents
35 rdf:type sgo:Patent
36 N123918f5e5de409bad5f6c7a700a9f0a rdf:first N9b5f79fe1d7b470aaba84000d05f6c54
37 rdf:rest rdf:nil
38 N1ab5ba0db3f04cb4bbc17f1f2a37bb1c rdf:first N2b9a41ce2e1b43b48b79af1e825b23fc
39 rdf:rest N2b596ebab1d24aecadb9b3928de1ec77
40 N2b596ebab1d24aecadb9b3928de1ec77 rdf:first Nf15bb36f7b9a4e198f08b5d7efc7221c
41 rdf:rest N5ed48316deec427295a6a8061b3ec8e4
42 N2b9a41ce2e1b43b48b79af1e825b23fc schema:name Hui-Chuan Wang
43 rdf:type schema:Person
44 N5ed48316deec427295a6a8061b3ec8e4 rdf:first N891a4de73f414194a3b8dc537cbb1712
45 rdf:rest N123918f5e5de409bad5f6c7a700a9f0a
46 N6bd2dbdfa79c45fcb755b1c683aafe26 schema:name Tong Zhao
47 rdf:type schema:Person
48 N891a4de73f414194a3b8dc537cbb1712 schema:name Yu-Hsia Chen
49 rdf:type schema:Person
50 N9b5f79fe1d7b470aaba84000d05f6c54 schema:name Min Li
51 rdf:type schema:Person
52 Nc2c1e34d92da4b898a295d4ab787ca56 schema:name Springer Nature - SN SciGraph project
53 rdf:type schema:Organization
54 Nee7b5d2dd59a4878817c3560176c3ffe rdf:first N6bd2dbdfa79c45fcb755b1c683aafe26
55 rdf:rest N1ab5ba0db3f04cb4bbc17f1f2a37bb1c
56 Nf15bb36f7b9a4e198f08b5d7efc7221c schema:name Kunliang Zhang
57 rdf:type schema:Person
58 anzsrc-for:2921 schema:inDefinedTermSet anzsrc-for:
59 rdf:type schema:DefinedTerm
60 sg:pub.10.1038/nmat1256 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053403072
61 https://doi.org/10.1038/nmat1256
62 rdf:type schema:CreativeWork
63 sg:pub.10.1038/nmat1257 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047761572
64 https://doi.org/10.1038/nmat1257
65 rdf:type schema:CreativeWork
66 https://www.grid.ac/institutes/grid.471215.4 schema:Organization
 




Preview window. Press ESC to close (or click here)


...