Testing Device For An Euv Optical System


Ontology type: sgo:Patent     


Patent Info

DATE

N/A

AUTHORS

Alexander Huebel , Thomas Niederhausen

ABSTRACT

A testing device (100) for an EUV optical system (200) includes a generating device (10) configured to generate wavelength variable test spectra for the EUV optical system (200) and a sensor unit configured to detect the test spectra generated by the EUV optical system (200).

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